Piezoelectric MEMS: Ferroelectric thin films for MEMS applications
نویسندگان
چکیده
منابع مشابه
TiNi-based thin films for MEMS applications
In this paper, some critical issues and problems in the development of TiNi thin films were discussed, including preparation and characterization considerations, residual stress and adhesion, frequency improvement, fatigue and stability, as well as functionally graded or composite thin film design. Different types of MEMS applications were reviewed and the prospects for future advances in fabri...
متن کاملResearch on the Piezoelectric Properties of AlN Thin Films for MEMS Applications
In this paper, the piezoelectric coefficient d33 of AlN thin films for MEMS applications was studied by the piezoresponse force microscopy (PFM) measurement and finite element method (FEM) simulation. Both the sample without a top electrode and another with a top electrode were measured by PFM to characterize the piezoelectric property effectively. To obtain the numerical solution, an equivalen...
متن کاملMechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications
Microcantilever deflection and the membrane deflection experiment (MDE) were used to examine the elastic and fracture properties of ultrananocrystalline diamond (UNCD) thin films in relation to their application to microelectromechanical systems (MEMS). Freestanding microcantilevers and membranes were fabricated using standard MEMS fabrication techniques adapted to our UNCD film technology. Ela...
متن کاملMEMS Based on Thin Ferroelectric Layers
Micro-Electro-Mechanical Systems (MEMS) are devices that display the most intense development in modern microelectronics (Kostsov, 2009). The main challenge of microelectromechanics is the design of unique micromechanical structures for various purposes. This research direction is based on achievements of advanced microelectronic technologies and inherits the basic advantages of electronic micr...
متن کاملUltrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications
Anirudha V. Sumant, Orlando Auciello, Robert W. Carpick, Sudarsan Srinivasan, and James E. Butler of smooth diamond films with uniform thickness and micro/nanostructure over large area substrates (≥150 mm diameter wafer), as recently demonstrated.1 Growth of thin (0.1 to 5 micron thick) diamond films on nondiamond substrates, typically conventional electronic substrates such as Si, SiC, and AlN...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Japanese Journal of Applied Physics
سال: 2018
ISSN: 0021-4922,1347-4065
DOI: 10.7567/jjap.57.040101